VACUUM FILM-FORMING APPARATUS

PROBLEM TO BE SOLVED: To easily seal a door mechanism for a barrel type substrate holder against a vacuum chamber, which charges/discharges the barrel-type substrate holder to/from a vacuum chamber. SOLUTION: This vacuum film-forming apparatus drives a traveling means 26 for supporting a barrel type...

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Bibliographische Detailangaben
Hauptverfasser:	YAMAKAWA KENJI, FUKUDA YOSHICHIKA, YONEYAMA NOBUO, OGAWA KENICHI, KARUISHI MASAYA
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To easily seal a door mechanism for a barrel type substrate holder against a vacuum chamber, which charges/discharges the barrel-type substrate holder to/from a vacuum chamber. SOLUTION: This vacuum film-forming apparatus drives a traveling means 26 for supporting a barrel type substrate holder 10 in the front, by a motor 60 for travel; and by driving the traveling means 26 toward the front, accommodates the barrel type substrate holder 10 in the vacuum chamber 2 and also tightly contacts the door mechanism 23 for the barrel type substrate holder with the vacuum chamber 2 side. Thereby, the apparatus can make the door mechanism 23 for the barrel type substrate holder tightly contact with the vacuum chamber 2 by the driving force of the motor 60 for travel, and consequently eliminate a clamping mechanism for tightly contacting the door mechanism 23 with the vacuum chamber 2. COPYRIGHT: (C)2005,JPO&NCIPI