METHOD FOR MANUFACTURING DISPLAY DEVICE, LIQUID CRYSTAL DISPLAY DEVICE AND METHOD FOR PATTERNING METAL FILM
PROBLEM TO BE SOLVED: To provide a method for manufacturing a display device, which attains a high yield with a simple process, a liquid crystal display device and a method for patterning a metal film, with which corrosive reduction of a base transparent conductive film is prevented. SOLUTION: The m...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a method for manufacturing a display device, which attains a high yield with a simple process, a liquid crystal display device and a method for patterning a metal film, with which corrosive reduction of a base transparent conductive film is prevented. SOLUTION: The method for manufacturing the display device has steps: for forming the transparent conductive film 1 on a substrate; for forming an Al film 2 electrically connected to the transparent conductive film on the transparent conductive film 1; for applying a resist 3 on the metal film, for patterning the resist so as to make the resist be provided with a thick part 3a and a thin part 3b by exposing and developing the resist, for exposing the Al film 2 corresponding to the thin part 3b of the resist 3 by ashing the resist 3 and for etching the Al film 2. COPYRIGHT: (C)2005,JPO&NCIPI |
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