METHOD AND APPARATUS FOR HIGH-THROUGHPUT INSPECTION OF LARGE FLAT PATTERNED MEDIA USING DYNAMICALLY PROGRAMMABLE OPTICAL SPATIAL FILTERING

PROBLEM TO BE SOLVED: To provide a method and an apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering. SOLUTION: In an inspection system for planar objects having a periodic structure, programmable optical Fourier filtering i...

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Hauptverfasser:	SARANLI AFSAR, LOPATIN OLEKSIY, OBOTNINE ALEXANDRE, WEISS ADAM
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method and an apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering. SOLUTION: In an inspection system for planar objects having a periodic structure, programmable optical Fourier filtering in the focal plane of a telecentric lens system is used to directly identify physical phenomena indicative of non-periodic defects. Lens assemblies and a coherent optical source are used to generate and observe a spatial Fourier transform of a periodic structure in the Fourier plane. OFF is performed in the focal plane using an electrically programmable and electrically alignable spatial light modulator. The spatial light modulator with high signal to noise ratio is electrically reconfigurable according to a feedback-driven, filter construction and alignment algorithm. The OFF enhances any non-periodic components present in the Fourier plane and final image plane of the object. COPYRIGHT: (C)2005,JPO&NCIPI