HEAT TREATMENT DEVICE

PROBLEM TO BE SOLVED: To rpovide a heat treatment device capable of securely and stably detecting the deterioration of a flash lamp. SOLUTION: The light emitted from a plurality of flash lamps and guided by a corresponding optical fiber 20 is focused on a CCD cell 36 of a CCD 25 through a light diffusion plate 34, a first lens 31, a filter 33, and a lens 32. This allows to stably take out the electric signals corresponding to the light intensity illuminated by each flash light. In making judgement of the irradiation state of each flash lamp by the intensity ratio between the light intensity illuminated from a plurality of flash lamps in flash heating a semiconductor wafer W and the standard illuminating intensity, as the variations of the intensity raio can be suppressed, the irraiation state of the flash lamp can be precisely obtained. COPYRIGHT: (C)2005,JPO&NCIPI