ELECTROSTATIC CHUCK AND DEVICE THEREOF

PROBLEM TO BE SOLVED: To provide an electrostatic chuck which can be steadily used for a long time in an atmospheric gas such as fluorine gas, and to provide an electrostatic chuck device. SOLUTION: A surface layer (25) having high alumina purity is formed on the surface of a chucking face 19 which is placed at the surface of the ceramic portion (11) of the electrostatic chuck (5). Specifically, a ceramic portion body (27), which occupies a large part of the ceramic portion (11) other than the surface layer (25), has low alumina purity of less than 98%, while the surface layer (25) has high alumina purity of 98% or more. An intermediate layer (33) comprising 10 wt% or more of glass components is provided between the surface layer (25) and the ceramic body (27) to improve bondability therebetween. COPYRIGHT: (C)2005,JPO&NCIPI