SUBSTRATE CARRIER

PROBLEM TO BE SOLVED: To prevent contamination with particles generated due to stripped porous silicon having a vary fragile structure formed on a substrate subjected to chemical conversion or particles generated from a bearing part due to the stress during the carriage. SOLUTION: A holding section...

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Bibliographische Detailangaben
1. Verfasser:	YANAGIDA KAZUTAKA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS HANDLING THIN OR FILAMENTARY MATERIAL MANIPULATORS PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To prevent contamination with particles generated due to stripped porous silicon having a vary fragile structure formed on a substrate subjected to chemical conversion or particles generated from a bearing part due to the stress during the carriage. SOLUTION: A holding section 100a holds the inside of the outer circumferential part of a substrate, and a carrying section 100c carries that substrate. In this regard, the carrying section 100c alters the orientation of the substrate from a first state where the surface of the substrate is horizontal to a second state where the surface of the substrate extends along the vertical direction, or reversely. COPYRIGHT: (C)2004,JPO&NCIPI