MASS MEASURING CHIP AND MASSES MEASURING DEVICE

MASS MEASURING CHIP AND MASSES MEASURING DEVICE

PROBLEM TO BE SOLVED: To provide a mass measuring chip capable of both heightening sensitivity and reducing costs. SOLUTION: This chip has a sensor part 10 equipped with a piezoelectric vibrating reed 20, wherein sensor side connection electrodes 24a, 24b for connecting the piezoelectric vibrating r...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MAEDA YOSHIO, KOBAYASHI SACHIHIRO, OGURA SEIICHIRO
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
WEIGHING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a mass measuring chip capable of both heightening sensitivity and reducing costs. SOLUTION: This chip has a sensor part 10 equipped with a piezoelectric vibrating reed 20, wherein sensor side connection electrodes 24a, 24b for connecting the piezoelectric vibrating reed 20 to an oscillation circuit element 41 are formed, and a base part 30 loaded with the oscillation circuit element 41, wherein base side connection electrodes 44a, 44b for connecting the oscillation circuit element 41 to the piezoelectric vibrating reed 20 are formed. The sensor side connection electrodes 24a, 24b are allowed to abut detachably on the base side connection electrodes 44a, 44b, and the piezoelectric vibrating reed 20 is electrically connected to the oscillation circuit element 41. COPYRIGHT: (C)2004,JPO&NCIPI