MANUFACTURING METHOD OF ROTOR FOR VACUUM PUMP, AND ROTOR OBTAINED BY IT
PROBLEM TO BE SOLVED: To provide a rotor that removes excessive work and waste of material in a case of using a bar material having a nonstandard diameter, has uniform mechanical characteristic and material density, and has improved temperature resistance. SOLUTION: The rotor having a set of radial...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a rotor that removes excessive work and waste of material in a case of using a bar material having a nonstandard diameter, has uniform mechanical characteristic and material density, and has improved temperature resistance. SOLUTION: The rotor having a set of radial peripheral vanes for a high vacuum turbomolecular pump is manufactured by forging a metal workpiece to obtain a generally cylindrical bodies 1 and 11 with homogeneous mechanical properties and subsequent mechanical workings. COPYRIGHT: (C)2004,JPO&NCIPI |
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