SCROLL TYPE FLUID MACHINE

PROBLEM TO BE SOLVED: To provide a scroll type fluid machine for improving vacuum performance by reducing gas amount released from an alumite coating to a fluid chamber. SOLUTION: This scroll type fluid machine 1 has a fixed scroll 20 and a turning scroll 30 made of an aluminum alloy. The turning sc...

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Hauptverfasser: SATO ITSUO, KAWAMATA TAKASHI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a scroll type fluid machine for improving vacuum performance by reducing gas amount released from an alumite coating to a fluid chamber. SOLUTION: This scroll type fluid machine 1 has a fixed scroll 20 and a turning scroll 30 made of an aluminum alloy. The turning scroll 30 is constituted so as to eccentrically rotate with respect to the fixed scroll 20, and the closed fluid chamber 20a is partitioned by the fixed scroll 20 and the turning scroll 30. The surfaces of the fixed scroll 20 and the turning scroll 30 for partitioning the fluid chamber 20a are provided with the alumite coating 32C having fine pores 32a, and thickness of each of a plurality of columnar structures 32D forming the alumite coating 32C is 0.1 μm or more. COPYRIGHT: (C)2004,JPO&NCIPI