PELLET CARRYING DEVICE, AND METHOD AND DEVICE FOR PELLET BONDING

PROBLEM TO BE SOLVED: To manufacture a bonding product of high quality which can pick up and carry a pellet without damaging the pellet, and perform bonding operation without damaging the pellet. SOLUTION: A pellet 1 located in a pick-up position is picked up by suction force of a suction nozzle 51,...

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Bibliographische Detailangaben
1. Verfasser:	KONO MICHITAKA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To manufacture a bonding product of high quality which can pick up and carry a pellet without damaging the pellet, and perform bonding operation without damaging the pellet. SOLUTION: A pellet 1 located in a pick-up position is picked up by suction force of a suction nozzle 51, and it is carried to a bonding position of a lead frame 41 and bonded. It has a conduit 54 connecting the suction nozzle 51 and a vacuum source 55, a pressure adjusting device 57 which is provided to the conduit 54, a pressure sensor 56 which detects the pressure inside the conduit, and a control device 62 which controls suction force produced in the suction nozzle 51 by controlling the pressure adjusting device 57 based on a detection signal of the pressure sensor 56. COPYRIGHT: (C)2004,JPO&NCIPI