ELECTRODE SHEET FOR ELECTROSTATIC CHUCK DEVICE AND ELECTROSTATIC CHUCK DEVICE USING IT

PROBLEM TO BE SOLVED: To provide an electrode sheet for an electrostatic chuck device having enough attraction force even to an insulator. SOLUTION: In the electrode sheet 30 for the electrostatic chuck device, a pair of insulating organic films 31, 32 are stuck via an insulating adhesive layer 33 a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HORI MASATOSHI, SHIMA TAKESHI, TOCHIHIRA JIYUN, HASEGAWA YUICHI, YAMAMOTO TOSHIYUKI, IMANISHI AKIO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING
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