ELECTRODE SHEET FOR ELECTROSTATIC CHUCK DEVICE AND ELECTROSTATIC CHUCK DEVICE USING IT

PROBLEM TO BE SOLVED: To provide an electrode sheet for an electrostatic chuck device having enough attraction force even to an insulator. SOLUTION: In the electrode sheet 30 for the electrostatic chuck device, a pair of insulating organic films 31, 32 are stuck via an insulating adhesive layer 33 and electrodes 34, 35 are formed inside the insulating adhesive layer 33. The electrode sheet is characterised in that an insulating adhesive constituting the insulating adhesive layer 33 is subjected to patterning on an insulating organic film so that a plurality of 1 mm-wide and 5 μm-thick band type electrodes are formed at an electrode interval of 1 mm to a total length of 5 m. A 10 μm-thick insulating adhesive layer is formed on it and an evaluating electrode sheet whereto an insulating organic film is stuck is prepared, and it has such insulation tolerance as not to produce short circuit between electrodes when a differential voltage of 5 kV is applied to an electrode of the evaluating electrode sheet. The insulating adhesive layer 33 is formed thicker than the electrode 34, 35. COPYRIGHT: (C)2004,JPO&NCIPI