FAN FILTER UNIT AND DEHUMIDIFYING WAREHOUSE

PROBLEM TO BE SOLVED: To provide a fan filter unit capable of remarkably cleaning the air inside a warehouse without leading nitrogen gas by adding a gaseous material removal function in addition to a dust removal function, in regard to a fan filter unit to be provided in a dehumidifying warehouse f...

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Bibliographische Detailangaben
1. Verfasser:	NOKURA TAKAYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING BLASTING CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL HEATING LIGHTING MECHANICAL ENGINEERING PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS RANGES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING VENTILATING WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a fan filter unit capable of remarkably cleaning the air inside a warehouse without leading nitrogen gas by adding a gaseous material removal function in addition to a dust removal function, in regard to a fan filter unit to be provided in a dehumidifying warehouse for storing semi-conductor wafers, and to provide a dehumidifying warehouse provided with the fan filter unit. SOLUTION: This fan filter unit for cleaning the warehouse provided with housing chambers is formed of a fan, a dust removal filter and a gaseous material removal filter. The air inside the housing chambers can be remarkably cleaned without leading the nitrogen gas by providing the fan filter unit in the dehumidifying warehouse provided with a dehumidifying means for maintaining the housing chambers at a low humidity. COPYRIGHT: (C)2004,JPO&NCIPI