COATING DEVICE AND COATING METHOD USING THE SAME

PROBLEM TO BE SOLVED: To provide a coating device capable of inhibiting generation of coating defect on a film by inhibiting entanglement of a foam into a coating liquid having adjusted coating thickness, and a coating method using it. SOLUTION: The coating device 11 is provided with a coating mecha...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YAMANE YUKIHIRO, HOSOI MITSUGI
Format: Patent
Sprache:eng
Schlagworte:
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