SEMICONDUCTOR SUBSTRATE WITH THROUGH ELECTRODE, METHOD FOR MANUFACTURING THE SAME, AND ELECTRONIC DEVICE

PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor substrate by which the manufacturing cost can be reduced and products are also manufactured with a high yield, a semiconductor substrate with a through electrode that is manufactured by the method, and an electronic device u...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TAKIZAWA ISAO, YAMAMOTO SATOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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