ELECTRON MICROSCOPE, OPERATING METHOD OF ELECTRON MICROSCOPE, ELECTRON MICROSCOPE OPERATING PROGRAM, AND COMPUTER-READABLE RECORDING MEDIUM

PROBLEM TO BE SOLVED: To provide an electron microscope allowing users unfamiliar to operation of a microscope to obtain a temporary observation image in a short time as a sample image for obtaining an optimum observation image, for the same conditions with the observation image to be actually obtained. SOLUTION: The electron microscope produces a temporary observation image with one or more parameters of the image observation conditions being varied in stages or continuously in the same picture image and displays it on a display part 28. The electron microscope, for example, divides the scanning area into a plurality of sub-areas A, B, C, D. Based on each sub-area, a temporary observation image is produced by scanning the scanning area of the surface of the sample, for a plurality of different image observation conditions and displays the temporary image on the display part 28. The plurality of different observation conditions are determined by parameters including acceleration voltage, spot size, contrast, and brightness. A desired image can be designated from the resulting temporary observation images. Thus optimum image observation conditions can be automatically set even by a user unfamiliar to the operation of the electron microscope. COPYRIGHT: (C)2004,JPO&NCIPI