MULTILAYER OBSERVATION TYPE OPTICAL MICROSCOPE AND MULTILAYER OBSERVATION UNIT

PROBLEM TO BE SOLVED: To provide a multilayer observation type real time optical microscope. SOLUTION: In the optical microscope, a pair of converging/collimating lenses 5 and 6 are arranged in the common optical axis of light projected on a sample to be observed 15 through an objective lens 14 and light passing through the objective lens in the opposite direction after being radiated or reflected by the sample, and a phase shifting means 7 for shifting the phase of the transmitted light within a prescribed extent is arranged between the lenses 5 and 6, then, the sample is irradiated in a focused state even in a depth corresponding to the phase of the wave surface of the light incident on the objective lens. COPYRIGHT: (C)2004,JPO&NCIPI