VACUUM COOLING METHOD

PROBLEM TO BE SOLVED: To perform the proper cooling suitable for a cooling matter by preventing the bumping and the scattering in accompany therewith, and loosing its shape. SOLUTION: This vacuum cooling method includes a first pressure holding process for depressurizing a processing tank 3 to keep the pressure in the processing tank 3 at a predetermined holding pressure, a second pressure holding process for depressurizing the processing tank 3 to keep a predetermined holding pressure reduced from the predetermined pressure by a specific value, and a depressurizing period determining process performed before the second pressure holding process for determining the depressurizing period in the second pressure holding process, when a temperature of the cooled matter 2 satisfies the determination standard near a saturated temperature corresponding to the predetermined holding pressure, and the depressurizing period determining process and the second pressure holding process are repeatedly performed. COPYRIGHT: (C)2004,JPO&NCIPI