PNEUMATIC ACTUATOR EQUIPPED WITH ELASTOMER MEMBRANE AND LOW ELECTRIC POWER ELECTROSTATIC FLAP VALVE STRUCTURE

PROBLEM TO BE SOLVED: To provide an actuator containing a pneumatic expansion type elastomer membrane, laminated on a printed circuit substrate and pressurized and decompressed by utilizing an electrostatically driven flap valve. SOLUTION: The flap valve obtains a high pressure regarding a closing p...

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Hauptverfasser: CHEUNG PATRICK C P, BERLIN ANDREW A, SWARTZ LARS-ERIK, DAVID K BIEGELSEN, JACKSON WARREN B
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creator CHEUNG PATRICK C P
BERLIN ANDREW A
SWARTZ LARS-ERIK
DAVID K BIEGELSEN
JACKSON WARREN B
description PROBLEM TO BE SOLVED: To provide an actuator containing a pneumatic expansion type elastomer membrane, laminated on a printed circuit substrate and pressurized and decompressed by utilizing an electrostatically driven flap valve. SOLUTION: The flap valve obtains a high pressure regarding a closing pressure and a holding pressure since the flap valve is closed only when a pressure gradient and a flow are zero. Fluid extracted from the elastomer membrane is discharged through the wall of the actuator while shrinking. An air jet type object moving device opens and closes an air hole for air jet by utilizing array of the pneumatic pressure actuator as a valve. An optical fiber microswitch positions a mirror by utilizing the pneumatic pressure actuator. COPYRIGHT: (C)2004,JPO&NCIPI
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language eng
recordid cdi_epo_espacenet_JP2004211898A
source esp@cenet
subjects ACTUATING-FLOATS
BLASTING
COCKS
DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
DEVICES FOR VENTING OR AERATING
ENGINEERING ELEMENTS AND UNITS
FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING ORCONTROL PURPOSES
FLUID-PRESSURE ACTUATORS
FLUID-PRESSURE ACTUATORS, e.g. SERVO-MOTORS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
HEATING
HYDRAULICS OR PNEUMATICS IN GENERAL
LIGHTING
MECHANICAL ENGINEERING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL
TAPS
THERMAL INSULATION IN GENERAL
VALVES
WEAPONS
title PNEUMATIC ACTUATOR EQUIPPED WITH ELASTOMER MEMBRANE AND LOW ELECTRIC POWER ELECTROSTATIC FLAP VALVE STRUCTURE
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