PNEUMATIC ACTUATOR EQUIPPED WITH ELASTOMER MEMBRANE AND LOW ELECTRIC POWER ELECTROSTATIC FLAP VALVE STRUCTURE

PROBLEM TO BE SOLVED: To provide an actuator containing a pneumatic expansion type elastomer membrane, laminated on a printed circuit substrate and pressurized and decompressed by utilizing an electrostatically driven flap valve. SOLUTION: The flap valve obtains a high pressure regarding a closing p...

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Bibliographische Detailangaben
Hauptverfasser:	CHEUNG PATRICK C P, BERLIN ANDREW A, SWARTZ LARS-ERIK, DAVID K BIEGELSEN, JACKSON WARREN B
Format:	Patent
Sprache:	eng
Schlagworte:	ACTUATING-FLOATS BLASTING COCKS DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR DEVICES FOR VENTING OR AERATING ENGINEERING ELEMENTS AND UNITS FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING ORCONTROL PURPOSES FLUID-PRESSURE ACTUATORS FLUID-PRESSURE ACTUATORS, e.g. SERVO-MOTORS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING HYDRAULICS OR PNEUMATICS IN GENERAL LIGHTING MECHANICAL ENGINEERING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an actuator containing a pneumatic expansion type elastomer membrane, laminated on a printed circuit substrate and pressurized and decompressed by utilizing an electrostatically driven flap valve. SOLUTION: The flap valve obtains a high pressure regarding a closing pressure and a holding pressure since the flap valve is closed only when a pressure gradient and a flow are zero. Fluid extracted from the elastomer membrane is discharged through the wall of the actuator while shrinking. An air jet type object moving device opens and closes an air hole for air jet by utilizing array of the pneumatic pressure actuator as a valve. An optical fiber microswitch positions a mirror by utilizing the pneumatic pressure actuator. COPYRIGHT: (C)2004,JPO&NCIPI