DISPLAY METHOD FOR LIQUID LEVEL AND USED AMOUNT OF LIQUID

PROBLEM TO BE SOLVED: To provide a measuring/display method of a liquid level in a container storing high-purity chemicals and a used amount of liquid, which is applied to a chemical vapor deposition or a chemical etching method in a kind of semiconductor manufacturing process. SOLUTION: A capacitan...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JANG GUANGNG, LIN JI-HUEI, CHOI JENG-JIE, LI BAI-MOU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS SEMICONDUCTOR DEVICES TESTING
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