DISPLAY METHOD FOR LIQUID LEVEL AND USED AMOUNT OF LIQUID

PROBLEM TO BE SOLVED: To provide a measuring/display method of a liquid level in a container storing high-purity chemicals and a used amount of liquid, which is applied to a chemical vapor deposition or a chemical etching method in a kind of semiconductor manufacturing process. SOLUTION: A capacitance value is detected by utilizing a property wherein the capacitance between a conductive hollow vessel or an inner vessel 30 in the container 10 and a capacitance inductor 20 is changed corresponding to the change of the liquid level of a solution, and the capacitance is measured relative to the solution in the vessel always or at constant time intervals, to thereby perform multipoint or continuous measurement of the residual quantity. Since the excess solution quantity in the vessel can be inspected at any time or adjusted and replenished at any time, the number of times of equipment stop can be reduced. In addition, the ratio (A/L) between the relative area and the relative distance between electrodes can be adjusted corresponding to a structure design of the device itself, and the capacitance can be enlarged effectively. The change of the capacitance value can be stabilized and the capacitance can be measured more accurately by installing the inner vessel 30. COPYRIGHT: (C)2004,JPO&NCIPI