WASHING METHOD FOR ORGANIC EL DEVICE MANUFACTURING APPARATUS, AND MANUFACTURING METHOD OF ORGANIC EL DEVICE

PROBLEM TO BE SOLVED: To provide a method for stably manufacturing a high quality organic EL device by evenly forming an organic layer on a surface of an electron hole injection electrode of a substrate formed with the electrode on a surface. SOLUTION: An interior of a conveyance chamber is washed b...

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Hauptverfasser:	TAKAHASHI NATSUKI, IGARASHI TAKESHI, NISHINOBO YASUKI, YAMADA KAZUO, SAKASEGAWA KOICHI, IRISAWA OSAMU, OTOMO MASAHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY CLEANING CLEANING IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for stably manufacturing a high quality organic EL device by evenly forming an organic layer on a surface of an electron hole injection electrode of a substrate formed with the electrode on a surface. SOLUTION: An interior of a conveyance chamber is washed by ozone gas by utilizing time for replacing a deposition source to a new deposition source set in an interior of an organic film forming chamber of the organic EL device manufacturing apparatus provided at least with the organic film forming chamber for forming the organic layer on the surface of the electron hole injection electrode of the substrate formed with the electrode on the surface, and the conveyance chamber arranged in an interior of a robot for conveying the electron hole injection electrode formed substrate to the organic film forming chamber. COPYRIGHT: (C)2004,JPO&NCIPI