MICROMACHINE CAPACITOR

PROBLEM TO BE SOLVED: To provide a micromachine capacitor for expanding a tuning range without enlarging an electrode plate. SOLUTION: This micromachine capacitor has a substrate side electrode plate 5 arranged on the substrate 1 side, a movable electrode plate 7 arranged at an interval to this subs...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OSONE YASUO, NISHIJIMA NORIYO
Format:	Patent
Sprache:	eng
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS TRANSPORTING
Online-Zugang:	Volltext bestellen
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