MICROMACHINE CAPACITOR

PROBLEM TO BE SOLVED: To provide a micromachine capacitor for expanding a tuning range without enlarging an electrode plate. SOLUTION: This micromachine capacitor has a substrate side electrode plate 5 arranged on the substrate 1 side, a movable electrode plate 7 arranged at an interval to this substrate side electrode plate 5 in parallel to this substrate side electrode plate 5, an elastic support mechanism for elastically and displaceably supporting the movable electrode plate 7 in the substrate side electrode plate 5 direction and wiring 17 and 19 respectively connected to the substrate side electrode plate 5 and the movable electrode 7 and impressing voltage between these two electrode plates 5 and 7. The elastic support mechanism has a first elastic part 9 connected to the movable electrode plate 7 and a second elastic part 13 positioned between the first elastic part and a substrate 1 and abutting on the first elastic part 9 when the movable electrode plate 7 is displaced in the substrate side electrode plate 5 direction, and is constituted so as to increase rigidity according to displacement of the movable electrode plate 7 in the substrate side electrode plate 5 direction by allowing the first elastic part 9 to abut on the second elastic part 13. COPYRIGHT: (C)2004,JPO&NCIPI