MICROMACHINE CAPACITOR
PROBLEM TO BE SOLVED: To provide a micromachine capacitor for expanding a tuning range without enlarging an electrode plate. SOLUTION: This micromachine capacitor has a substrate side electrode plate 5 arranged on the substrate 1 side, a movable electrode plate 7 arranged at an interval to this subs...
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| creator | OSONE YASUO NISHIJIMA NORIYO |
| description | PROBLEM TO BE SOLVED: To provide a micromachine capacitor for expanding a tuning range without enlarging an electrode plate. SOLUTION: This micromachine capacitor has a substrate side electrode plate 5 arranged on the substrate 1 side, a movable electrode plate 7 arranged at an interval to this substrate side electrode plate 5 in parallel to this substrate side electrode plate 5, an elastic support mechanism for elastically and displaceably supporting the movable electrode plate 7 in the substrate side electrode plate 5 direction and wiring 17 and 19 respectively connected to the substrate side electrode plate 5 and the movable electrode 7 and impressing voltage between these two electrode plates 5 and 7. The elastic support mechanism has a first elastic part 9 connected to the movable electrode plate 7 and a second elastic part 13 positioned between the first elastic part and a substrate 1 and abutting on the first elastic part 9 when the movable electrode plate 7 is displaced in the substrate side electrode plate 5 direction, and is constituted so as to increase rigidity according to displacement of the movable electrode plate 7 in the substrate side electrode plate 5 direction by allowing the first elastic part 9 to abut on the second elastic part 13. COPYRIGHT: (C)2004,JPO&NCIPI |
| format | Patent |
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SOLUTION: This micromachine capacitor has a substrate side electrode plate 5 arranged on the substrate 1 side, a movable electrode plate 7 arranged at an interval to this substrate side electrode plate 5 in parallel to this substrate side electrode plate 5, an elastic support mechanism for elastically and displaceably supporting the movable electrode plate 7 in the substrate side electrode plate 5 direction and wiring 17 and 19 respectively connected to the substrate side electrode plate 5 and the movable electrode 7 and impressing voltage between these two electrode plates 5 and 7. The elastic support mechanism has a first elastic part 9 connected to the movable electrode plate 7 and a second elastic part 13 positioned between the first elastic part and a substrate 1 and abutting on the first elastic part 9 when the movable electrode plate 7 is displaced in the substrate side electrode plate 5 direction, and is constituted so as to increase rigidity according to displacement of the movable electrode plate 7 in the substrate side electrode plate 5 direction by allowing the first elastic part 9 to abut on the second elastic part 13. COPYRIGHT: (C)2004,JPO&NCIPI</description><edition>7</edition><language>eng</language><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; PERFORMING OPERATIONS ; TRANSPORTING</subject><creationdate>2004</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20040702&DB=EPODOC&CC=JP&NR=2004181552A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20040702&DB=EPODOC&CC=JP&NR=2004181552A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>OSONE YASUO</creatorcontrib><creatorcontrib>NISHIJIMA NORIYO</creatorcontrib><title>MICROMACHINE CAPACITOR</title><description>PROBLEM TO BE SOLVED: To provide a micromachine capacitor for expanding a tuning range without enlarging an electrode plate. SOLUTION: This micromachine capacitor has a substrate side electrode plate 5 arranged on the substrate 1 side, a movable electrode plate 7 arranged at an interval to this substrate side electrode plate 5 in parallel to this substrate side electrode plate 5, an elastic support mechanism for elastically and displaceably supporting the movable electrode plate 7 in the substrate side electrode plate 5 direction and wiring 17 and 19 respectively connected to the substrate side electrode plate 5 and the movable electrode 7 and impressing voltage between these two electrode plates 5 and 7. The elastic support mechanism has a first elastic part 9 connected to the movable electrode plate 7 and a second elastic part 13 positioned between the first elastic part and a substrate 1 and abutting on the first elastic part 9 when the movable electrode plate 7 is displaced in the substrate side electrode plate 5 direction, and is constituted so as to increase rigidity according to displacement of the movable electrode plate 7 in the substrate side electrode plate 5 direction by allowing the first elastic part 9 to abut on the second elastic part 13. 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SOLUTION: This micromachine capacitor has a substrate side electrode plate 5 arranged on the substrate 1 side, a movable electrode plate 7 arranged at an interval to this substrate side electrode plate 5 in parallel to this substrate side electrode plate 5, an elastic support mechanism for elastically and displaceably supporting the movable electrode plate 7 in the substrate side electrode plate 5 direction and wiring 17 and 19 respectively connected to the substrate side electrode plate 5 and the movable electrode 7 and impressing voltage between these two electrode plates 5 and 7. The elastic support mechanism has a first elastic part 9 connected to the movable electrode plate 7 and a second elastic part 13 positioned between the first elastic part and a substrate 1 and abutting on the first elastic part 9 when the movable electrode plate 7 is displaced in the substrate side electrode plate 5 direction, and is constituted so as to increase rigidity according to displacement of the movable electrode plate 7 in the substrate side electrode plate 5 direction by allowing the first elastic part 9 to abut on the second elastic part 13. COPYRIGHT: (C)2004,JPO&NCIPI</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| subjects | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS TRANSPORTING |
| title | MICROMACHINE CAPACITOR |
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