SUBSTRATE WITH BUILT-IN ELEMENT, AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a substrate with a built-in element which prevents the permeation of water from an insulating layer to a hollow part. SOLUTION: An element 25 is installed in the hollow part 20 within a wiring board 2 where insulating layers 5-9 and wiring layers 10-15 are stacked, and a film 30 of hydrophobic material is made at the inner face of the hollow part 20 such that it covers the surfaces of the insulating layers exposed in the hollow part 20 and the boundary between the insulating layers and the wiring layers at the inner face of the hollow part 20. Furthermore, the topside (the face which faces the mounting face of the element 25) of the hollow part 20 is covered with a metallic film 31. COPYRIGHT: (C)2004,JPO