FILM HEATER

PROBLEM TO BE SOLVED: To provide a light film heater allowing to reduce film thickness and manufacturing cost. SOLUTION: A base layer 7 formed from PES is formed at the predetermined dimension by a well-known method. This base layer 7 is led into a sputtering machine, and an intermediate layer 9 is...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	MOCHIZUKI KAZUMA, MANABE KATSUHIDE
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a light film heater allowing to reduce film thickness and manufacturing cost. SOLUTION: A base layer 7 formed from PES is formed at the predetermined dimension by a well-known method. This base layer 7 is led into a sputtering machine, and an intermediate layer 9 is formed by sputtering using a SiO2target. Target of the sputtering machine is changed to stainless steel, and a thin film heating layer 9 is formed by sputtering. Silver paste is coated on the thin film heating layer 9 in the predetermined range of both ends thereof, and dried to form an electrode layer 11, and the film heater 1 is thereby finished. COPYRIGHT: (C)2004,JPO