WASHING SYSTEM PROVIDED WITH RINSED LIQUID REPRODUCING APPARATUS

PROBLEM TO BE SOLVED: To obtain a washing system by which a rinsed liquid is purified ed and can be reutilized in cooperation with the removability of foreign matters optimum for coating. SOLUTION: A washing liquid D is circulated through a cleaning tank 1, a withdrawal port 2, a rinsed liquid repro...

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Bibliographische Detailangaben
Hauptverfasser: TAKASU MASUKI, UENO YUJI, KAWACHI SHINSAKU
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To obtain a washing system by which a rinsed liquid is purified ed and can be reutilized in cooperation with the removability of foreign matters optimum for coating. SOLUTION: A washing liquid D is circulated through a cleaning tank 1, a withdrawal port 2, a rinsed liquid reproducing apparatus 5 and a washing machine 4 with a counterflow 6 inside a loop. When it passes through the inside of the washing tank 1, ultrasonic washing is applied to the object A to be washed while moving the same against the counterflow 6, and further, ultrasonic rinsing is performed. When it passes through the reproducible lineage in the range of the withdrawal port 2, the rinsed liquid reproducing agent 5, and the inlet of the washing machine 4, the purifying treatment is continuously performed to the corrupted rinsed liquid in multi-steps by the rinsed liquid reproducing apparatus 5, so that a clean rinsed liquid can be reproduced. COPYRIGHT: (C)2004,JPO