LOW THERMAL EXPANSION CERAMIC MEMBER, METHOD OF MANUFACTURING THE SAME, AND MEMBER FOR SEMICONDUCTOR MANUFACTURE APPARATUS

LOW THERMAL EXPANSION CERAMIC MEMBER, METHOD OF MANUFACTURING THE SAME, AND MEMBER FOR SEMICONDUCTOR MANUFACTURE APPARATUS

PROBLEM TO BE SOLVED: To provide a low thermal expansion ceramic member containing cordierite, spodumene and eucryptite, etc., in which high precision is maintained by clarifying a treatment method for suppressing crack by working and minimizing residual stress on the highly precisely finished surfa...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YOSHITOMI YASUKI, TANAKA MANABU
Format: Patent
Sprache:eng
Schlagworte:
ARTIFICIAL STONE
BASIC ELECTRIC ELEMENTS
CEMENTS
CERAMICS
CHEMISTRY
COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS
CONCRETE
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
LIME, MAGNESIA
METALLURGY
REFRACTORIES
SEMICONDUCTOR DEVICES
SLAG
TREATMENT OF NATURAL STONE
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a low thermal expansion ceramic member containing cordierite, spodumene and eucryptite, etc., in which high precision is maintained by clarifying a treatment method for suppressing crack by working and minimizing residual stress on the highly precisely finished surface and the change of precision. SOLUTION: The low thermal expansion ceramic member is composed of a ceramic having ≤0.5×10-6/°C thermal expansion coefficient at 10-40°C, ≤0.5% porosity and has ≤20 MPa residual stress. As the ceramic, a ceramic containing at least one kind selected from a group composed of cordierite, spodumene and eucryptite is suitably used. COPYRIGHT: (C)2004,JPO