ELECTRON MICROSCOPE, METHOD FOR OPERATING ELECTRON MICROSCOPE, OPERATING PROGRAM OF ELECTRON MICROSCOPE AND COMPUTER READABLE RECORDING MEDIUM

PROBLEM TO BE SOLVED: To facilitate searching a field by registering an observed image by a suitable magnification on another screen. SOLUTION: An electron microscope can display the observed image on a display unit 28 by applying an acceleration voltage to an electron gun to irradiate a sample with an electron beam based on predetermined image observation conditions, scanning the desired area of the surface of the sample while secondary electrons or reflected electrons emitted from the sample are detected by one or more detectors, thereby focusing the image. The display unit 28 includes a first display region 47 for displaying the image observing at present real time, and a second display region 48 provided on another screen from the region 47 to display the image displayed on the region 47 by registering at predetermined timing. The observation magnification of the image registered with the region 48 is set lower than that displayed on the region 47 at the registering time. COPYRIGHT: (C)2004,JPO