RECORDING-REPRODUCTION DISCRETE TYPE MAGNETIC HEAD AND MANUFACTURING METHOD THEREOF
PROBLEM TO BE SOLVED: To prevent deformation caused by halation at the time of forming an upper magnetic film of an induction type magnetic head, and to reduce resistance by making a spiral coil diameter small. SOLUTION: A 1st spiral layer of a conductor coil 2a of Cu or the like is formed on a magn...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To prevent deformation caused by halation at the time of forming an upper magnetic film of an induction type magnetic head, and to reduce resistance by making a spiral coil diameter small. SOLUTION: A 1st spiral layer of a conductor coil 2a of Cu or the like is formed on a magnetic gap film 14 by a plating method. A 2nd spiral layer of a conductor coil 2b is formed thereon via an insulating film 4a. The 1st layer of the conductor coil 2a and the 2nd layer of the conductor coil 2b are jointed to each other at a contact part 3 in an inner circumferential part of the spirals and connected in series. SImultaneously with the formation of the 2nd layer of the conductor coil 2b, a dummy pattern (wall) 9 having almost as wide as the upper magnetic film 1 is formed between the contact part 3 and the rear end of the position where the upper magnetic film 1 is formed in the inner circumferential part of the spirals. Thereafter, the 2nd layer of the conductor coil 2b is covered with an insulating film 4b, and a plating substrate film 6 for forming the upper magnetic film 1 is formed on the insulating film 4b by sputtering or the like. A photo resist is applied on these laminated films, and a resist frame for forming the upper magnetic film 1 is formed by exposure. COPYRIGHT: (C)2004,JPO |
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