PIEZOELECTRIC ACTUATOR AND PRECISION STAGE

PROBLEM TO BE SOLVED: To provide a piezoelectric actuator that performs continuous, super-precision feed to a driven apparatus. SOLUTION: Feed action piezoelectric elements F1, F2 are fixedly attached to a table T with their expanding and contracting directions matching the feed direction of the table T. Lock-up piezoelectric elements C1, C2 are fixedly provided on the other ends of the feed action piezoelectric elements F1, F2. At least either one of the lock-up piezoelectric elements C1, C2 is locked up, and one of the feed action piezoelectric elements F1, F2 at the side corresponding to the lock-up piezoelectric elements C1 or C2 is expanded and contracted to move the table T in the set moving direction of a guide G. Also, by expanding and contracting the feed action piezoelectric elements F1, F2 in harmony to move the table T in the set moving direction even under the lock-up state of both of the lock-up piezoelectric elements C1, C2, feed is performed continuously to the table T the instance the lock-up operation of the lock-up piezoelectric elements C1, C2 is changed over and even after and before the changeover. COPYRIGHT: (C)2004,JPO