OPERATION METHOD OF GAS SUPPLY DEVICE

PROBLEM TO BE SOLVED: To provide an operation method of a gas supply device capable performing an efficient operation at low cost. SOLUTION: The gas supply device comprises a gas generation source, a gas holder for temporarily storing the generated gas, and a gas supply pipe for supplying the gas from the gas holder to a plurality of gas using facilities, the supply pipe having a pressure regulating valve and a flow regulating valve. When the gas supply device is operated while adjusting the pressure and flow rate of the passing gas, an opening set value for setting the opening of the flow regulating valve to 80-90% of full open is newly added to the gas pressure set value of a gas pressure control system for feeding back the deviation between the pressure result value performed by the pressure regulating valve and a pressure set value to the valve opening, and a pressure control system for feeding back the opening set value and the opening result value is added. The lower limit gas pressure is regularly calculated by use of a relational equation established in the added pressure control system, and the calculation value is taken as the set value of the lower limit gas pressure. COPYRIGHT: (C)2004,JPO