TETRAHYDROPYRANYL ESTERS OF OXYBIS(BENZENE CARBOXYLIC ACIDS)

TETRAHYDROPYRANYL ESTERS OF OXYBIS(BENZENE CARBOXYLIC ACIDS)

PROBLEM TO BE SOLVED: To provide novel tetrahydropyranyl esters of oxybi (benzene carboxylic acids) usable as a photosensitizer in a photosensitive resist composition, and a dissolution inhibitor or the like. SOLUTION: The tetrahydropyranyl esters of the oxybis(benzene carboxylic acids) are represen...

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Bibliographische Detailangaben
1. Verfasser: MIYAGI SACHIKO
Format: Patent
Sprache:eng
Schlagworte:
CHEMISTRY
HETEROCYCLIC COMPOUNDS
METALLURGY
ORGANIC CHEMISTRY
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide novel tetrahydropyranyl esters of oxybi (benzene carboxylic acids) usable as a photosensitizer in a photosensitive resist composition, and a dissolution inhibitor or the like. SOLUTION: The tetrahydropyranyl esters of the oxybis(benzene carboxylic acids) are represented by general formula (I), where R is an alkyl group; m is 0, 1 or 2; and n is 1 or 2. COPYRIGHT: (C)2004,JPO