GUIDE MECHANISM OF STRAIGHT ADVANCING STAGE

PROBLEM TO BE SOLVED: To provide a guide mechanism of a straight advancing stage capable of controlling yawing or the like and assuring high positioning accuracy. SOLUTION: The guide mechanism 10 of the straight advancing stage is equipped with a guide rail 11 having a rail part 11a and a rail suppo...

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Bibliographische Detailangaben
Hauptverfasser:	WATANABE JUN, TAKAHASHI MAKOTO, YOSHIMOTO RYUTARO, KOIKE HARUHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	BEARINGS BLASTING COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILSOF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELEMENTS OR CRANKSHAFT MECHANISMS ENGINEERING ELEMENTS AND UNITS FLEXIBLE SHAFTS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING INSTRUMENT DETAILS LIGHTING MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS MECHANICAL ENGINEERING METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS PHYSICS ROTARY BODIES OTHER THAN GEARING ELEMENTS SHAFTS THERMAL INSULATION IN GENERAL TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a guide mechanism of a straight advancing stage capable of controlling yawing or the like and assuring high positioning accuracy. SOLUTION: The guide mechanism 10 of the straight advancing stage is equipped with a guide rail 11 having a rail part 11a and a rail support part 11b whose width is narrower than that of the rail part 11a, and a cylindrical slider 12 surrounding the outer peripheral surface of the rail part 11a and having a slit 12a formed to insert the rail support part 11b. On each of a pair of opening end surfaces 12d formed by the slit 12a, first jet ports 21 are formed so as to flow in fluid between the opening end surfaces 12d and the side surfaces of the rail support part 11b adjacent to the opening end surfaces 12d. COPYRIGHT: (C)2004,JPO