METHOD OF MANUFACTURING TWO-DIMENSIONAL ARRAY ULTRASONIC PROBE

PROBLEM TO BE SOLVED: To provide a method of manufacturing a two-dimensional array ultrasonic probe having a high homogenity of ultrasonic transmitting-receiving characteristics of each piezoelectric vibrator piece. SOLUTION: The manufacturing method comprises a step (1) of forming an acoustic matching layer on the surface of an upper electrode of a piezoelectric vibrator composed of a plate-like piezoelectric 3 with electrodes on the upside and downside; a step (2) of forming cuts extending in a two-dimensional direction into the surface of the lower electrode of the vibrator from the lower electrode surface to the upper electrode surface up to a depth 80-95% the thickness of the piezoelectric, thereby dividing the lower electrode into a plurality of lower electrode pieces; a step (3) of electrically connecting electrode terminals of a separately prepared wiring board to the lower electrode pieces of the vibrator, the board having a plurality of electrode terminals corresponding to the lower electrode pieces of the vibrator on one surface, and electric wirings connected to the electrode terminals on the other surface; and a step (4) of forming a sound absorptive material on the opposite surface of the wiring board to the piezoelectric vibrator. COPYRIGHT: (C)2004,JPO