TELECENTRIC OPTICAL SYSTEM AND INSPECTING DEVICE USING THE SAME

PROBLEM TO BE SOLVED: To provide a telecentric optical system which has brightness capable of taking in the light from an object to be inspected sufficiently and can improve an inspection precision, and to provide an inspecting device using the optical system. SOLUTION: The inspecting device has the...

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Bibliographische Detailangaben
1. Verfasser:	WAJIKI ATSUHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a telecentric optical system which has brightness capable of taking in the light from an object to be inspected sufficiently and can improve an inspection precision, and to provide an inspecting device using the optical system. SOLUTION: The inspecting device has the both-side telecentric optical system 7 allowing emitted light emitted from the object 3 at a specified divergent angle to form an image at a specified position, and a CCD panel 9 arranged at the image forming position of the optical system 7 and picking up the image of the image-formed object 3, and inspects the uniformity of the emitted light from the object 3 based on image data obtained by the panel 9. The optical system 7 is equipped with a plurality of lens groups Gb and Gf arranged so that an optical axis 7A may be aligned therewith, and has an effective F value equal to or under the effective F value of the object 3 regulated by the specified divergent angle. COPYRIGHT: (C)2004,JPO