METHOD FOR MANUFACTURING PROTECTIVE FILM

PROBLEM TO BE SOLVED: To manufacture a protective film at low temperatures with no damage by a plasma CVD method on an element. SOLUTION: A protective film is manufactured by using a vacuum ultraviolet rays CVD device 100 which has a vacuum ultraviolet rays generation part 102, a reaction chamber 10...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	MOTOYAMA RIICHI, MIYANO JUNICHI, SAIKAWA KIYOHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To manufacture a protective film at low temperatures with no damage by a plasma CVD method on an element. SOLUTION: A protective film is manufactured by using a vacuum ultraviolet rays CVD device 100 which has a vacuum ultraviolet rays generation part 102, a reaction chamber 106 provided with a support tray 114 for supporting a substrate 116, and a window 104 for separating the reaction chamber 106 from the vacuum ultraviolet rays generator 102. In manufacturing, a temperature of the substrate 116 is held at the low temperature by a heat insulater 118 provided in the support tray 114, while an organic based material gas is supplied from a gas supply 112 to the inside of the reaction chamber 106, and also vacuum ultraviolet rays are irradiated from the vacuum ultraviolet rays generator 102 through the window 104. COPYRIGHT: (C)2004,JPO