SUBSTRATE CONVEYING APPARATUS AND SUBSTRATE PROCESSING SYSTEM

PROBLEM TO BE SOLVED: To provide a substrate conveying apparatus in which decrease in the quality of the substrate is suppressed by preventing the substrate and conveying rollers from being charged in an apparatus for conveying the substrate with the rollers, and to provide a substrate processing sy...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	TANAKA SATORU, NAKAMURA TSUGIO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING HANDLING THIN OR FILAMENTARY MATERIAL NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PACKING PERFORMING OPERATIONS PHYSICS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a substrate conveying apparatus in which decrease in the quality of the substrate is suppressed by preventing the substrate and conveying rollers from being charged in an apparatus for conveying the substrate with the rollers, and to provide a substrate processing system having such a substrate conveying apparatus. SOLUTION: An inlet conveying unit 2 has a plurality of the conveying rollers 22 and a liquid supply unit 6. The rollers 22 have a plurality of rolls 20, and the liquid supply unit 6 supplies an antistatic liquid to the rolls 20. Thus, a static electricity generated between the rollers 22 and the substrate is prevented. Even if the rollers 22 are charged, the rollers 22 are neutralized by an antistatic liquid L brought into contact with the rollers 22, and hence a decrease in a treating quality of the substrate can be prevented. COPYRIGHT: (C)2004,JPO