METHOD AND SYSTEM FOR CONTROLLING DEFLECTION AMPLITUDE AND OFFSET OF RESONANCE SCANNING MIRROR BY USING TIMING OF PHOTODETECTOR
PROBLEM TO BE SOLVED: To provide a system and a method for controlling the deflection amplitude and offset of a laser beam deflected by a resonance mirror galvanometer to which only beam deflection timing information is provided. SOLUTION: Two photodetectors 10, 12 are arranged in the vicinity of bo...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a system and a method for controlling the deflection amplitude and offset of a laser beam deflected by a resonance mirror galvanometer to which only beam deflection timing information is provided. SOLUTION: Two photodetectors 10, 12 are arranged in the vicinity of both the ends of a deflection range of a resonance scanning mirror 14 for deflecting a laser beam 16. Respective photodetectors 10, 12 are located on equal distance from the center 18 of deflection. When a beam is swept from a side part 10 to a side part 12, the photodetectors 10, 12 generate pulses. COPYRIGHT: (C)2004,JPO |
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