FILTER DEVICE OF SEALING GAS

PROBLEM TO BE SOLVED: To provide a filter device which sufficiently maintaining cleanliness even in the case of buffer gas containing much liquid part without greatly remodeling the situation around the device. SOLUTION: The flow path 7 of buffer gas from an inflow port 70 to an outflow port 79 is f...

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Bibliographische Detailangaben
Hauptverfasser: IWAI SUSUMU, FUKUOKA HARUYOSHI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a filter device which sufficiently maintaining cleanliness even in the case of buffer gas containing much liquid part without greatly remodeling the situation around the device. SOLUTION: The flow path 7 of buffer gas from an inflow port 70 to an outflow port 79 is formed in a container 2. Two cylindrical filter elements 5 dividing the flow path into an upstream side and a downstream side are arranged in series in the longitudinal direction along the flow path 7, and the buffer gas is sequentially cleaned with respective elements. COPYRIGHT: (C)2004,JPO