SUCKING AND CARRYING DEVICE

PROBLEM TO BE SOLVED: To provide a sucking and carrying device usable in carrying various parts such as substrates for semiconductor devices by sucking without damaging the substrates being carried, with high carrying reliability, with less restricting conditions are set depending on articles to be...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	SADAKATA TORU
Format:	Patent
Sprache:	eng
Schlagworte:	CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS,CABLES PACKING PERFORMING OPERATIONS STORING TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a sucking and carrying device usable in carrying various parts such as substrates for semiconductor devices by sucking without damaging the substrates being carried, with high carrying reliability, with less restricting conditions are set depending on articles to be carried, and which is maintenance-free and low-cost. SOLUTION: Suction pads 3 having flexibility are provided on a suction panel 1, and chambers 6 are formed between the suction pads and the suction panel 3. The chambers 6 are communicated with an air passage 4. COPYRIGHT: (C)2004,JPO