ELECTRONIC SCANNING MICROSCOPE DEVICE

PROBLEM TO BE SOLVED: To provide an electronic scanning microscope device producing a stable image regardless of quality of material of test pieces and performing excellent observation and evaluation of such as length measuring. SOLUTION: The electronic scanning microscope device comprises an electron gun 24 for emitting primary electrons to a test piece T, an HV control part 39 for adjusting and applying acceleration voltage to the electron gun 24, a secondary electron detector 30 for detecting secondary electrons emitted from the test piece T by radiating primary electrons, a reflection electron detector 31 for detecting reflection electrons, and a main control part 36 connecting an image processing unit 38 for displaying a predetermined image of the test piece T based on the detection result from both detectors 30, 31. The electronic scanning microscope device also has an electron amount detecting part 37 to output the detection result of both detectors 30, 31 to the main control part 36, as well as to calculate, from the detection result of both detectors 30, 31, a secondary electron emission efficiency in the test piece T for controlling the acceleration voltage of the HV control part 39 based on the calculation result. COPYRIGHT: (C)2004,JPO