METHOD FOR REDUCING OR REMOVING NH3/HF BY-PRODUCT WHEN NITROGEN TRIFLUORIDE IS PRODUCED
PROBLEM TO BE SOLVED: To provide a method for reducing or removing a liquefied NH3/HF/MFz by-product when NF3is produced. SOLUTION: NF3, HF and N2and another nitrogen fluoride are formed as gaseous components and a liquefied NH3/HF/MFz mixture is formed as a liquefied molten waste in an NF3reactor 1...
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| creator | FEGLEY KENNETH E TSIRUKIS ATHANASIOS WITHERS JR HOWARD P LILECK JOHN THEODORE |
| description | PROBLEM TO BE SOLVED: To provide a method for reducing or removing a liquefied NH3/HF/MFz by-product when NF3is produced. SOLUTION: NF3, HF and N2and another nitrogen fluoride are formed as gaseous components and a liquefied NH3/HF/MFz mixture is formed as a liquefied molten waste in an NF3reactor 12. The liquefied molten waste is reduced or removed by the method which has steps such as a step to react F2with the liquefied NH3/HF/MFz mixture, a step to strip HF from the liquefied molten waste in a stripping vessel 14 and a step to return the stripped liquefied molten waste into the reactor. COPYRIGHT: (C)2004,JPO |
| format | Patent |
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SOLUTION: NF3, HF and N2and another nitrogen fluoride are formed as gaseous components and a liquefied NH3/HF/MFz mixture is formed as a liquefied molten waste in an NF3reactor 12. The liquefied molten waste is reduced or removed by the method which has steps such as a step to react F2with the liquefied NH3/HF/MFz mixture, a step to strip HF from the liquefied molten waste in a stripping vessel 14 and a step to return the stripped liquefied molten waste into the reactor. COPYRIGHT: (C)2004,JPO</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| subjects | CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING |
| title | METHOD FOR REDUCING OR REMOVING NH3/HF BY-PRODUCT WHEN NITROGEN TRIFLUORIDE IS PRODUCED |
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