METHOD FOR REDUCING OR REMOVING NH3/HF BY-PRODUCT WHEN NITROGEN TRIFLUORIDE IS PRODUCED

METHOD FOR REDUCING OR REMOVING NH3/HF BY-PRODUCT WHEN NITROGEN TRIFLUORIDE IS PRODUCED

PROBLEM TO BE SOLVED: To provide a method for reducing or removing a liquefied NH3/HF/MFz by-product when NF3is produced. SOLUTION: NF3, HF and N2and another nitrogen fluoride are formed as gaseous components and a liquefied NH3/HF/MFz mixture is formed as a liquefied molten waste in an NF3reactor 1...

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Hauptverfasser: FEGLEY KENNETH E, TSIRUKIS ATHANASIOS, WITHERS JR HOWARD P, LILECK JOHN THEODORE
Format: Patent
Sprache:eng
Schlagworte:
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method for reducing or removing a liquefied NH3/HF/MFz by-product when NF3is produced. SOLUTION: NF3, HF and N2and another nitrogen fluoride are formed as gaseous components and a liquefied NH3/HF/MFz mixture is formed as a liquefied molten waste in an NF3reactor 12. The liquefied molten waste is reduced or removed by the method which has steps such as a step to react F2with the liquefied NH3/HF/MFz mixture, a step to strip HF from the liquefied molten waste in a stripping vessel 14 and a step to return the stripped liquefied molten waste into the reactor. COPYRIGHT: (C)2004,JPO