CIRCUIT PARAMETER EXTRACTION APPARATUS

PROBLEM TO BE SOLVED: To extract and compensate a circuit parameter for the purpose of compensation of difference between a design value and a finished value of a circuit constant to be caused since the finished value of a pattern is different from the design value since wavelength and pattern width...

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Bibliographische Detailangaben
1. Verfasser:	HATSUDA TSUGUYASU
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CALCULATING CINEMATOGRAPHY COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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