CIRCUIT PARAMETER EXTRACTION APPARATUS

PROBLEM TO BE SOLVED: To extract and compensate a circuit parameter for the purpose of compensation of difference between a design value and a finished value of a circuit constant to be caused since the finished value of a pattern is different from the design value since wavelength and pattern width...

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Bibliographische Detailangaben
1. Verfasser:	HATSUDA TSUGUYASU
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CALCULATING CINEMATOGRAPHY COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To extract and compensate a circuit parameter for the purpose of compensation of difference between a design value and a finished value of a circuit constant to be caused since the finished value of a pattern is different from the design value since wavelength and pattern width of exposed light becomes equivalent, reflection and interference of the exposed light is generated. SOLUTION: This circuit parameter extraction apparatus is provided with a step 112B as a means for deciding whether or not a design value DD3 of distance between extracted gate electrode wirings is larger than a specified value h, a step 114B as a means for judging that there is an influence of the reflection and the interference of the exposed light if DD3 ≤ h, and for calculating a finished value LP3 to the design value LD3 (=g) of gate electrode wiring width as LP3=g-δ3g by a predetermined coefficient δ3 (0