LARGE SIZED CERAMIC SUBSTRATE

PROBLEM TO BE SOLVED: To provide a large sized ceramic substrate which prevents the occurrence of burr when the large-sized ceramic substrate is divided and prevents the generation of a crack. SOLUTION: In a large-sized substrate 10 comprising a plurality of a substrate region 10a where a plurality of substrates are extracted and the outer peripheral regions 10b formed on the outer peripheral part of a substrate region 10a and has individual split grooves 2 and 3 formed thereon and a plurality of substrates are obtained 1 by splitting the substrate along the split grooves 2 and 3, the leading end angle (a) of the split grooves 2a and 2b formed in the substrate region 10a is larger than the leading angles of the split grooves 2b and 3b formed in the outer peripheral region 10b. COPYRIGHT: (C)2004,JPO