FLUORINE ELECTROLYTIC CELL

PROBLEM TO BE SOLVED: To provide a fluorine electrolytic cell which can stably supply highly-pure fluorine (F2) useful as a raw material for a fluoride or laser oscillation, a cleaning gas, etc. for thin-film deposition apparatus, etc. SOLUTION: The fluorine electrolytic cell is equipped with a meta...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	HAMANA TAKANORI, OHASHI MITSUYA
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS THEREFOR CHEMISTRY ELECTROLYTIC OR ELECTROPHORETIC PROCESSES ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTIONOF COMPOUNDS OR NON-METALS METALLURGY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a fluorine electrolytic cell which can stably supply highly-pure fluorine (F2) useful as a raw material for a fluoride or laser oscillation, a cleaning gas, etc. for thin-film deposition apparatus, etc. SOLUTION: The fluorine electrolytic cell is equipped with a metallic vessel filled with a substance which can repetitively absorb and release molecular fluorine. COPYRIGHT: (C)2004,JPO